Epitaxial c-axis oriented BaTiO3 thin films on SrTiO3-buffered Si(001) by atomic layer deposition

by atomic layer deposition Thong Q. Ngo, Agham B. Posadas, Martin D. McDaniel, Chengqing Hu, John Bruley, Edward T. Yu, Alexander A. Demkov, and John G. Ekerdt Department of Chemical Engineering, The University of Texas at Austin, Austin, Texas 78712, USA Department of Physics, The University of Texas at Austin, Austin, Texas 78712, USA Department of Electrical Engineering, The University of Texas at Austin, Austin, Texas 78712, USA IBM Research Division, Yorktown Heights, New York 10593, USA